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Diamond waya yekucheka tekinoroji inozivikanwawo sekonsolidation abrasive yekucheka tekinoroji.Iko kushandiswa kwe electroplating kana resin bonding nzira yedhaimondi abrasive yakasanganiswa pamusoro pesimbi waya, dhaimani waya inobata zvakananga pamusoro pesilicon tsvimbo kana silicon ingot kugadzira kukuya, kuwana mhedzisiro yekucheka.Diamond wire yekucheka ine maitiro ekukurumidza kucheka kukurumidza, kukwirira kwekucheka kurongeka uye kurasikirwa kwezvinhu.

Parizvino, iyo imwe chete crystal market ye diamond wire yekucheka silicon wafer yakagamuchirwa zvizere, asi yakasanganawo mukugadzirisa kwekusimudzira, pakati peiyo velvet chena ndiyo inonyanya kunetsa.Tichifunga izvi, bepa rino rinotarisa maitiro ekudzivirira madhaimondi waya yekucheka monocrystalline silicon wafer velvet chena dambudziko.

Iyo yekuchenesa nzira yedhaimani waya yekucheka monocrystalline silicon wafer ndeyekubvisa iyo silicon wafer yakachekwa newaya saw muchina chishandiso kubva mundiro resin, kubvisa tambo yerabha, uye kuchenesa silicon wafer.Midziyo yekuchenesa inonyanya kufanochenesa muchina (degumming muchina) nemuchina wekuchenesa.Nzira huru yekuchenesa yemuchina wepre-cleaning ndeye: feeding-spray-spray-ultrasonic cleaning-degumming-clean water rinsing-underfeeding.Nzira huru yekuchenesa yemuchina wekuchenesa ndeye: kudyisa-mvura yakachena yekuchenesa-mvura yakachena rinsing-alkali washing-alkali washing-pure water rinsing-pure water rinsing-pre-dehydration (kusimudza zvishoma) -drying-feeding.

Nheyo yekugadzira imwe-crystal velvet

Monocrystalline silicon wafer ndiyo hunhu hweanisotropic corrosion ye monocrystalline silicon wafer.Iyo reaction musimboti ndiyo inotevera Chemical reaction equation:

Si + 2NaOH + H2O = Na2SiO3 + 2H2↑

Muchidimbu, nzira yekugadzira suede ndeiyi: NaOH mhinduro yemhando yakasiyana yekuora kwekristaro yakasiyana, (100) pamusoro pekuora kwepamusoro kupfuura (111), saka (100) kune monocrystalline silicon wafer mushure me anisotropic corrosion, yakapedzisira yaumbwa pamusoro. (111) koni ine mativi mana, iyo "piramidhi" chimiro (sezvinoratidzwa mumufananidzo 1).Mushure mekunge chimiro chaumbwa, kana mwenje uchinge waitika kune piramidhi inotsvedza pane imwe Angle, mwenje unozoratidzwa kune yakatsetseka kune imwe Angle, ichigadzira chechipiri kana kupfuura kutora, nekudaro ichidzikisa kutaridzika pamusoro peiyo silicon wafer. , ndiko kuti, chiedza chemusungo chinokonzera (ona Mufananidzo 2).Izvo zviri nani saizi uye kufanana kwechimiro che "piramidhi", iyo inonyanya kuoneka musungo wekuita, uye yakadzika iyo yepamusoro emitrate yesilicon wafer.

Mufananidzo 1: Micromorphology ye monocrystalline silicon wafer mushure mekugadzirwa kwealkali

Mufananidzo 2: Chiedza chemusungo musimboti we "piramidhi" chimiro

Ongororo yeimwe crystal whitening

Nekutarisa maikorosikopu erekitironi pane chena silicon wafer, zvakaonekwa kuti piramidhi microstructure yewhite wafer munzvimbo iyi yakanga isina kuumbwa, uye pamusoro pacho pairatidzika kunge iine musara we "waxy" yakasara, nepo piramidhi chimiro che suede. munzvimbo yakachena yesilicon wafer yakafanana yakaumbwa zviri nani (ona Mufananidzo 3).Kana paine zvisaririra pamusoro pe monocrystalline silicon wafer, iyo nzvimbo ichange iine nzvimbo yakasara "piramidhi" saizi yechimiro uye kufanana chizvarwa uye mhedzisiro yenzvimbo yakajairika haina kukwana, zvichikonzera kuti yakasara velvet pamusoro pekuratidzira yakakwira kupfuura nzvimbo yakajairika, iyo nzvimbo ine high reflectivity kana ichienzaniswa neyakajairwa nzvimbo mukuona inoratidzwa sechena.Sezvinogona kuonekwa kubva pakugovera chimiro chemuchena nzvimbo, haisi yenguva dzose kana yenguva dzose chimiro munzvimbo huru, asi munzvimbo dzemunharaunda chete.Izvo zvinofanirwa kunge zviri izvo zvinosvibisa zvemuno pamusoro peiyo silicon wafer hazvina kucheneswa, kana mamiriro epamusoro esilicon wafer anokonzerwa nekusvibiswa kwechipiri.

Mufananidzo 3: Kuenzanisa kwedunhu microstructure misiyano muvelvet chena silicon wafers

Pamusoro pedhaimani waya yekucheka silicon wafer yakanyanya kutsvedzerera uye kukuvara kudiki (sezvinoratidzwa mumufananidzo 4).Kana ichienzaniswa nedhaka resilicon wafer, kumhanya kweiyo alkali uye dhaimondi waya yekucheka silicon wafer pamusoro inononoka kupfuura iyo yedhaka yekucheka monocrystalline silicon wafer, saka pesvedzero yezvisaririra zvepasi pane velvet mhedzisiro iri pachena.

Mufananidzo wechina

Iyo huru yakasara sosi yedhaimani waya-yakacheka silicon wafer pamusoro

(1) Inotonhorera: iyo mikuru yedhaimondi waya yekucheka inotonhorera ndeye surfactant, dispersant, defamagent uye mvura nezvimwe zvinhu.Iyo yekucheka mvura ine yakanakisa kuita ine kumira zvakanaka, kupararira uye nyore kuchenesa kugona.Masurfactants anowanzo ane zvirinani hydrophilic zvivakwa, zviri nyore kuchenesa musilicon wafer yekuchenesa maitiro.Iko kuenderera kutenderedza uye kutenderera kwezvinowedzera izvi mumvura kunoburitsa huwandu hukuru hwefuro, zvichikonzera kudzikira kwekuyerera kweanotonhorera, kukanganisa kuita kwekutonhodza, uye yakakomba furo uye kunyangwe furo rinofashukira matambudziko, izvo zvinokanganisa zvakanyanya kushandiswa.Naizvozvo, iyo inotonhorera inowanzo shandiswa neiyo defoaming agent.Kuti ive nechokwadi chekubvisa furo kuita, iyo yechinyakare silicone uye polyether kazhinji irombo hydrophilic.Iyo inonyungudutsa mumvura iri nyore kwazvo kushambadza uye kuramba iri pamusoro peiyo silicon wafer mukucheneswa kunotevera, zvichikonzera dambudziko remavara machena.Uye haina kunyatsoenderana nezvikamu zvikuru zveinotonhorera, Naizvozvo, inofanirwa kugadzirwa kuita zvikamu zviviri, Zvikamu zvikuru uye defoaming agents zvakawedzerwa mumvura, Mukushandiswa kwekushandiswa, zvinoenderana nemamiriro efuro, Haikwanise kudzora huwandu. kushandiswa uye kuyerwa kweantifoam agents, Inogona kubvumira zviri nyore kuwandisa kweanoaming agents, Zvinotungamira mukuwedzera kwesilicon wafer pamusoro pemasara, Izvo zvakanyanya kunetsa kushanda, Nekudaro, nekuda kwemutengo wakaderera wezvigadzirwa uye defoaming agent yakasvibirira. zvinhu, Naizvozvo, mazhinji edzimba anotonhorera ese anoshandisa iyi fomula system;Imwe inotonhorera inoshandisa itsva defoaming agent, Inogona kunyatsoenderana nezvinhu zvikuru, Hapana kuwedzera, Inogona kunyatso kudzora huwandu hwayo, Inogona kunyatso kudzivirira kushandiswa kwakanyanya, Iwo maekisesaizi zvakare ari nyore kuita, Nemaitiro ekuchenesa, Yayo. zvisaririra zvinogona kudzorwa kusvika padanho rakaderera, MuJapan uye vashoma vanogadzira mudzimba vanotora iyi fomula sisitimu, Zvisinei, nekuda kwekudhura kwayo kwezvinhu, mutengo wayo hausi pachena.

(2) Glue uye resin vhezheni: mune yakazotevera nhanho yedhaimani waya yekucheka maitiro, Iyo silicon wafer padyo neino magumo yakachekwa kare, Iyo silicon wafer pamagumo ekubuda haisati yachekwa, Iyo yekutanga kucheka diamondi. waya yatanga kucheka kune rubber layer uye resin plate, Sezvo silicon rod glue uye resin board zvese zviri epoxy resin zvigadzirwa, Kupfava kwayo kunenge kuri pakati pe55 ne95 ℃, Kana iyo nzvimbo yekupfavisa yerabha layer kana resin. ndiro yakadzikira, inogona kupisa zviri nyore panguva yekucheka uye kuita kuti ive yakapfava uye kunyunguduka, Yakanamirwa kune simbi waya uye silicon wafer pamusoro, Ikonzeresa kugona kwekucheka kwedhaimani mutsara wakadzikira, Kana zvimedu zvesilicon zvinogamuchirwa uye yakasvibiswa neresin, Kana yabatanidzwa, yakaoma zvikuru kugeza, Kusvibiswa kwakadaro kunowanzoitika pedyo nemucheto wesilicon wafer.

(3) silicon poda: mukugadzira madhaimondi waya yekucheka inoburitsa yakawanda yesilicon poda, nekucheka, dhaka inotonhorera inotonhorera yemukati ichave yakanyanya kukwirira, kana hupfu hwakakura zvakakwana, huchanamatira kune iyo silicon pamusoro, uye dhaimondi waya yekucheka kwesilicon poda saizi uye saizi inotungamira kune yayo nyore kune adsorption pane iyo silicon pamusoro, ita kuti zviome kuchenesa.Naizvozvo, ita shuwa kugadziridzwa uye mhando yeinotonhorera uye kuderedza hupfu hwemukati mune inotonhorera.

(4) yekuchenesa mumiriri: iko ikozvino kushandiswa kwedhaimani waya yekucheka vanogadzira vanonyanya kushandisa dhaka kucheka panguva imwe chete, kunyanya kushandisa dhaka kucheka prewashing, kuchenesa nzira uye yekuchenesa mumiririri, nezvimwewo, imwechete diamond waya yekucheka tekinoroji kubva kune yekucheka michina, gadzira a yakazara seti yemutsara, inotonhorera uye yekucheka dhaka ine mutsauko wakakura, saka iyo inoenderana yekuchenesa maitiro, yekuchenesa mumiriri dosage, fomula, nezvimwe zvinofanirwa kunge zviri zvedhaimani wire yekucheka gadzirisa inoenderana.Yekuchenesa mumiriri chinhu chakakosha, iyo yekutanga yekuchenesa mumiriri formula surfactant, alkalinity haina kukodzera kuchenesa diamond waya yekucheka silicon wafer, inofanirwa kunge iri pamusoro pedhaimondi waya silicon wafer, kuumbwa uye pamusoro pezvisaririra zveanonangwa yekuchenesa mumiriri, uye tora nzira yekuchenesa.Sezvambotaurwa pamusoro apa, kuumbwa kwe defoaming agent hakudiwi mukucheka dhaka.

(5) Mvura: dhaimani waya yekucheka, pre-kuwacha uye kuchenesa mvura inofashukira ine tsvina, inogona kuve yakashongedzwa pamusoro peiyo silicon wafer.

Deredza dambudziko rekuita velvet bvudzi jena kuoneka mazano

(1) Kushandisa chinotonhodza nekupararira kwakanaka, uye chinotonhodza chinodiwa kushandisa yakaderera-yasara defoaming agent kuderedza zvakasara zvezvinotonhodza zvikamu pamusoro pesilicon wafer;

(2) Shandisa glue yakakodzera uye resin ndiro kuderedza kusvibiswa kwesilicon wafer;

(3) Chinotonhodza chinonatswa nemvura yakachena kuitira kuti pasave netsvina iri nyore yasara mumvura yakashandiswa;

(4) Pamusoro pedhaimondi waya yakachekwa nesilicon wafer, shandisa chiitiko uye yekuchenesa mhedzisiro yakakodzera yekuchenesa mumiriri;

(5) Shandisa dhaimondi mutsetse unotonhorera pamhepo kudzoreredza system kudzikisa zvirimo musilicon poda mukucheka maitiro, kuitira kuti unyatso kudzora zvakasara zvesilicon poda pane silicon wafer pamusoro pewafer.Panguva imwecheteyo, inogonawo kuwedzera kuvandudzwa kwekushisa kwemvura, kuyerera uye nguva mu-pre-washing, kuve nechokwadi chokuti silicon powder inoshambidzwa nenguva.

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(7) Iyo silicon wafer inochengeta nzvimbo yakanyorova mukuita degumming, uye haigone kuoma zvakasikwa.(8) Mukuchenesa kwesilicon wafer, nguva yakafumurwa mumhepo inogona kuderedzwa zvakanyanya sezvinobvira kudzivirira kugadzirwa kwemaruva pamusoro peiyo silicon wafer.

(9) Vashandi vekuchenesa havafanire kubata zvakananga pamusoro peiyo silicon wafer panguva yese yekuchenesa, uye vanofanirwa kupfeka magurovhosi erabha, kuti asaburitse zvigunwe zvekudhinda.

(10) Mukutaura [2], kuguma kwebheteri kunoshandisa hydrogen peroxide H2O2 + alkali NaOH yekuchenesa nzira maererano nehuwandu hwehuwandu hwe1: 26 (3% NaOH mhinduro), iyo inogona kunyatso kuderedza kuitika kwedambudziko.Nheyo yayo yakafanana neSC1 yekuchenesa mhinduro (inowanzozivikanwa semvura 1) ye semiconductor silicon wafer.Iyo huru nzira: iyo oxidation firimu pasilicon wafer pamusoro inoumbwa neiyo oxidation yeH2O2, iyo yakasvibiswa neNaOH, uye iyo oxidation uye corrosion inoitika kakawanda.Naizvozvo, zvimedu zvakanamirwa pasilicon poda, resin, simbi, nezvimwewo) zvakare inowira mumvura yekuchenesa ine corrosion layer;nekuda kweiyo oxidation yeH2O2, iyo organic matter iri pawafer surface inoora kuita CO2, H2O uye yabviswa.Iyi nzira yekuchenesa yanga iri vagadziri vesilicon wafer vachishandisa maitiro aya kugadzirisa kucheneswa kwedhaimondi waya yekucheka monocrystalline silicon wafer, silicon wafer mudzimba uye Taiwan uye vamwe vanogadzira mabhatiri batch kushandiswa kwevelvet chena dambudziko zvichemo.Kune zvakare vanogadzira bhatiri vakashandisa yakafanana velvet pre-kuchenesa maitiro, zvakare zvinobudirira kudzora kutaridzika kwevelvet chena.Zvinogona kuonekwa kuti iyi nzira yekuchenesa inowedzerwa mu-silicon wafer yekuchenesa maitiro kuti ibvise silicon wafer yakasara kuitira kuti ibudirire kugadzirisa dambudziko rebvudzi jena pamagumo ebheteri.

mhedziso

Parizvino, kucheka kwewaya yedhaimondi kwave ndiyo huru yekugadzira tekinoroji mumunda wekucheka kwekristaro imwe chete, asi mukusimudzira dambudziko rekugadzira velvet chena kwave kunetsa silicon wafer uye vanogadzira bhatiri, zvichitungamira kune vanogadzira mabhatiri kune diamond wire yekucheka silicon. wafer ine kumwe kuramba.Kuburikidza nekuenzanisa kuongororwa kwenzvimbo chena, inonyanya kukonzerwa neyakasara pamusoro peiyo silicon wafer.Kuitira kudzivirira zvirinani dambudziko resilicon wafer muchitokisi, bepa rino rinoongorora zvingangobva zvekusvibiswa kwepasi kwesilicon wafer, pamwe nemazano ekuvandudza uye matanho mukugadzira.Maererano nenhamba, dunhu uye chimiro chemavara machena, zvikonzero zvinogona kuongororwa uye kuvandudzwa.Inonyanya kukurudzirwa kushandisa hydrogen peroxide + alkali yekuchenesa maitiro.Chiitiko chakabudirira chakaratidza kuti chinogona kudzivirira zvinobudirira dambudziko redhaimani waya yekucheka silicon wafer inogadzira velvet chena, yekunongedza kune general indasitiri mukati nevagadziri.