nhau

Tekinoroji yekucheka waya yedhaimani inozivikanwawo se tekinoroji yekucheka yakabatana. Inoshandiswa nenzira ye electroplating kana resin bonding yedhaimani yakabatana pamusoro pewaya yesimbi, waya yedhaimani ichishanda zvakananga pamusoro petsvimbo yesilicon kana silicon ingot kugadzira kukuya, kuti iwane mhedzisiro yekucheka. Kucheka waya yedhaimani kune hunhu hwekumhanya nekukurumidza, kunyatsocheka kwakanyanya uye kurasikirwa nezvinhu zvishoma.

Parizvino, musika we silicon wafer wekucheka waya yedhaimani wagamuchirwa zvizere, asi wakasanganawo mukuita kwekusimudzira, pakati pawo paine dambudziko guru re velvet chena. Tichifunga nezveizvi, bepa iri rinotarisa pakudzivirira dambudziko rekucheka waya yedhaimani monocrystalline silicon wafer velvet chena.

Maitiro ekuchenesa dhayamondi wire cutting monocrystalline silicon wafer ndeyekubvisa silicon wafer yakachekwa ne wire saw muchina tool kubva mu resin plate, kubvisa rabha strip, uye kuchenesa silicon wafer. Midziyo yekuchenesa inonyanya kushandiswa muchina wekuchenesa usati watanga (degumming machine) uye muchina wekuchenesa. Maitiro makuru ekuchenesa muchina wekuchenesa usati watanga ndeekuti: feeding-spray-spray-ultrasonic cleaning-degumming-clean water rinsing-underfeeding. Maitiro makuru ekuchenesa muchina wekuchenesa ndeekuti: feeding-pure water rinsing-pure water rinsing-alkali washing-alkali washing-pure wash rinsing-pure water rinsing-pre-dehydration (slow lifting) -omesa-dyisa.

Nheyo yekugadzira velvet ine kristalo imwe chete

Wafer yesilicon inopenya chete ndiyo inokonzera ngura yeanisotropic yewafer yesilicon inopenya chete. Musimboti we reaction ndewekuti chemical reaction equation inotevera:

Si + 2NaOH + H2O = Na2SiO3 + 2H2↑

Muchidimbu, maitiro ekuumbwa kwesuede ndeaya: Mhinduro yeNaOH yehuwandu hwakasiyana hwekuora kwenzvimbo dzakasiyana dzekristaro, (100) kumhanya kwekuora kwenzvimbo kupfuura (111), saka (100) kune monocrystalline silicon wafer mushure mekuora kweanisotropic, pakupedzisira yakaumbwa pamusoro pe (111) cone ine mativi mana, kureva chimiro che "piramidhi" (sezvinoratidzwa mumufananidzo 1). Mushure mekunge chimiro chaumbwa, kana chiedza chawira pa piramidhi slope pane imwe Angle, chiedza chicharatidzwa kune imwe Angle, zvichiita kuti kunyura kwechipiri kana kupfuura, nokudaro zvichideredza kupenya pamusoro pe silicon wafer, kureva, mwenje we trap effect (ona Mufananidzo 2). Kana saizi uye kufanana kwechimiro che "piramidhi" kuri nani, mhedzisiro ye trap iri pachena, uye kudzika kwe emitrate ye silicon wafer.

Mufananidzo 1: Micromorphology ye monocrystalline silicon wafer mushure mekugadzirwa kwealkali

Mufananidzo 2: Nheyo yemusungo wechiedza wechimiro che "piramidhi"

Kuongororwa kwekucheneswa kwekristaro imwe chete

Nekuskena maikorosikopu ye electron pa silicon wafer chena, zvakaonekwa kuti chimiro che piramidhi che wafer chena munzvimbo iyi chakanga chisina kuumbwa, uye pamusoro pacho pairatidzika kunge paine jira re "waxy" residue, nepo chimiro che piramidhi che suede munzvimbo chena ye silicon wafer imwe chete chakagadzirwa zviri nani (ona Mufananidzo 3). Kana paine masara pamusoro pe monocrystalline silicon wafer, pamusoro pacho pachava ne "pyramid" structure size uye kuumbwa kwakafanana uye mhedzisiro yenzvimbo yakajairika haina kukwana, zvichiita kuti residual velvet surface reflectivity yakakwira kupfuura nzvimbo yakajairika, nzvimbo ine reflectivity yakakwira zvichienzaniswa nenzvimbo yakajairika mu visual reflectivity inoratidzwa sechena. Sezvinogona kuonekwa kubva muchimiro chekupararira kwenzvimbo chena, haisi chimiro chakajairika kana chakajairika munzvimbo yakakura, asi munzvimbo dzemunharaunda chete. Zvinofanira kunge zviri zvekuti tsvina yemunharaunda pamusoro pe silicon wafer haina kucheneswa, kana kuti mamiriro epamusoro pe silicon wafer anokonzerwa nekusvibiswa kwechipiri.

Mufananidzo 3: Kuenzanisa kwemusiyano wezvikamu zve microstructure mu velvet white silicon wafers

Pamusoro pewaya yesimbi yesimbi yedhaimani yakatsetseka uye kukuvara kwacho kudiki (sezvinoratidzwa muMufananidzo 4). Kana tichienzanisa newaya yesimbi ...

Mufananidzo 4: (A) Micrograph yepamusoro yemortar cut silicon wafer (B) micrograph yepamusoro yediamond wire cut silicon wafer

Nzvimbo huru yasara yewaya yesimbi yesilicon yakachekwa newaya yedhaimani

(1) Chinhu chinotonhodza: ​​zvinhu zvikuru zvinoshandiswa pakutonhodza waya yedhaimani zvinosanganisira chinhu chinotonhodza, chinoparadzira, chinosvibisa mvura nezvimwe zvinhu. Mvura inocheka ine simba rakanaka rekumisa, kupararira uye kugona kuchenesa zviri nyore. Zvinhu zvinotonhodza zvinowanzova nehunyanzvi huri nani hwemvura, izvo zviri nyore kuchenesa panguva yekuchenesa silicon wafer. Kugara uchikurunga uye kutenderera kwezvinowedzera izvi mumvura kuchaburitsa furo rakawanda, zvichikonzera kudzikira kwekuyerera kwemvura inotonhodza, zvichikanganisa mashandiro ekutonhodza, uye matambudziko akakomba efuro uye kunyange furo rinopfungaira, izvo zvinokanganisa zvakanyanya kushandiswa. Saka, chinhu chinotonhodza chinowanzo shandiswa nemushonga unobvisa furo. Kuti ive nechokwadi chekuti furo rinobvisa furo, silicone yechinyakare nepolyether zvinowanzova zvisina simba remvura. Chinhu chinonyungudutsa mumvura chiri nyore kunyungudutsa uye chinoramba chiri pamusoro pesilicon wafer mushure mekuchenesa, zvichikonzera dambudziko renzvimbo chena. Uye haishande zvakanaka nezvikamu zvikuru zvechinhu chinotonhodza, Saka, inofanira kugadzirwa muzvikamu zviviri, Zvikamu zvikuru uye zvinhu zvinobvisa furo zvakaiswa mumvura, Mukushandiswa, zvichienderana nemamiriro efuro, Haikwanise kudzora kushandiswa uye chiyero chezvinoshandiswa zve antifoam, Inogona kubvumira nyore nyore kuti zvinhu zvinobvisa furo zviwedzere, Zvichikonzera kuwedzera kwezvisara zve silicon wafer pamusoro, Hazvina kunaka zvakare kushanda, Zvisinei, nekuda kwemutengo wakaderera wezvinhu zvakagadziriswa uye zvinhu zvinobvisa furo, Saka, zvizhinji zvezvinotonhodza zvemumba zvinoshandisa iyi fomura system; Imwe inotonhodza inoshandisa chinhu chitsva chinobvisa furo, Inogona kushandira zvakanaka nezvikamu zvikuru, Hapana kuwedzerwa, Inogona kudzora huwandu hwayo zvinobudirira uye zvine mwero, Inogona kudzivirira kushandiswa zvakanyanya, Maekisesaizi acho ari nyorewo kuita, Nemaitiro ekuchenesa akakodzera, Zvisara zvayo zvinogona kudzorwa kusvika padanho rakaderera, MuJapan uye vagadziri vashoma vemumba vanoshandisa iyi fomura system, Zvisinei, nekuda kwemutengo wayo wakakwira wezvinhu zvakagadziriswa, Mutengo wayo hausi pachena.

(2) Guruu neresin: muchikamu chekupedzisira chekucheka waya yedhaimani, Silicon wafer iri pedyo nemugumo unouya yakachekwa pachine nguva, Silicon wafer iri pamucheto wekubuda haisati yachekwa, Waya yedhaimani yakachekwa pakutanga yatanga kucheka kusvika parubber layer neresin plate, Sezvo silicon rod glue neresin board zvese zviri zvigadzirwa zve epoxy resin, Nzvimbo yayo yekunyorovesa iri pakati pe55 ne95℃, Kana nzvimbo yekunyorovesa yerubber layer kana resin plate yakaderera, inogona kupisa zviri nyore panguva yekucheka uye kuita kuti ive yakapfava uye inyunguduke, Yakabatana nesimbi waya nesilicon wafer pamusoro, Inokonzera kugona kwekucheka kwedhaimani kwakaderera, Kana kuti silicon wafers dzinogamuchirwa uye dzakasvibiswa neresin, Kana dzabatanidzwa, zvinonetsa kwazvo kuzvigeza. Kusvibiswa kwakadaro kunowanzoitika pedyo nemucheto werubber yesilicon.

(3) upfu hwesilicon: panguva yekucheka waya yedhaimani, hupfu hwesilicon huchabuda hwakawanda, uye kana hupfu hwacho hwakakura zvakakwana, huchanamatira pamusoro pesilicon, uye saizi nehukuru hwesilicon powder yedhaimani zvinoita kuti zvive nyore kunyudza pamusoro pesilicon, zvichiita kuti zviome kuchenesa. Saka, iva nechokwadi chekuvandudzwa uye kunaka kwechinhu chinotonhodza uye kuderedza huwandu hweupfu muchinhu chinotonhodza.

(4) mushonga wekuchenesa: Vagadziri vekucheka waya dzedhaimani vari kushandisa kucheka kwedhaimani panguva imwe chete, kunyanya kushandisa kucheka kwedhaimani, kuchenesa uye kuchenesa, nezvimwewo, tekinoroji yekucheka waya dzedhaimani imwe chete kubva mukugadzira, kugadzira seti yakazara yemutsetse, kucheka kwedhiraivha nedhaivha kune musiyano mukuru, saka maitiro ekuchenesa anoenderana, chiyero chemushonga wekuchenesa, fomura, nezvimwewo zvinofanirwa kunge zviri zvekucheka waya dzedhaimani. Mushonga wekuchenesa chinhu chakakosha, fomura yemushonga wekuchenesa wekutanga, alkalinity haina kukodzera kuchenesa wafer yedhaimani, inofanira kunge iri pamusoro pewafer yedhaimani, chimiro uye zvasara zvemushonga wekuchenesa wakanangana, uye tora nemaitiro ekuchenesa. Sezvambotaurwa pamusoro, mushonga wekuchenesa haudiwi mukucheka kwedhaimani.

(5) Mvura: kucheka waya yedhaimani, kusukwa kwekutanga uye kuchenesa mvura inoyerera ine tsvina, inogona kunamirwa pamusoro pewafer yesilicon.

Deredza dambudziko rekuita kuti bvudzi revelvet rionekwe sejena mazano

(1) Kushandisa chinotonhodza chine kupararira kwakanaka, uye chinotonhodza chinodiwa kushandisa chinhu chinobvisa madonhwe emvura mashoma kuderedza zvasara zvezvikamu zvinotonhodza pamusoro pesilicon wafer;

(2) Shandisa guruu rakakodzera neresin plate kuderedza kusvibiswa kwesilicon wafer;

(3) Chinhu chinotonhodza mvura chinosanganiswa nemvura yakachena kuitira kuti pasave netsvina iri nyore mumvura yakashandiswa;

(4) Pamusoro pewaya yedhaimani yakachekwa nesilicon wafer, shandisa mushonga wekuchenesa wakakodzera kuchenesa;

(5) Shandisa system yekudzoreredza simbi ye diamond line coolant online kuderedza huwandu hwe silicon powder panguva yekucheka, kuitira kuti unyatso dzora zvasara zve silicon powder pamusoro pe silicon wafer ye wafer. Panguva imwe chete, inogonawo kuwedzera kuvandudzwa kwekupisa kwemvura, kuyerera kwayo uye nguva yekusuka, kuve nechokwadi chekuti silicon powder yagezwa nenguva.

(6) Kana silicon wafer yaiswa patafura yekuchenesa, inofanira kurapwa nekukasika, uye silicon wafer inofanira kunyorova panguva yese yekuchenesa.

(7) Chigadziko chesilicon chinochengetedza pamusoro pemvura panguva yekubvisa gum, uye hachigoni kuoma zvakasikwa. (8) Mukuchenesa chigadziko chesilicon, nguva inoonekwa mumhepo inogona kuderedzwa zvakanyanya kudzivirira kugadzirwa kwemaruva pamusoro pechigadziko chesilicon.

(9) Vashandi vekuchenesa havafanirwe kubata zvakananga pamusoro pesilicon wafer panguva yese yekuchenesa, uye vanofanirwa kupfeka magirovhosi erabha, kuitira kuti vasadhinde zvigunwe.

(10) Mukutaura [2], magumo ebhatiri anoshandisa hydrogen peroxide H2O2 + alkali NaOH kuchenesa maitiro zvichienderana nehuwandu hwe1:26 (3%NaOH solution), iyo inogona kuderedza kuitika kwedambudziko zvinobudirira. Nheyo yayo yakafanana neSC1 cleansing solution (inozivikanwa se liquid 1) ye semiconductor silicon wafer. Maitiro ayo makuru: oxidation film pamusoro pesilicon wafer inoumbwa ne oxidation yeH2O2, iyo inoora neNaOH, uye oxidation ne corrosion zvinoitika kakawanda. Nokudaro, zvidimbu zvakabatana nesilicon powder, resin, metal, nezvimwewo) zvinowirawo mumvura yekuchenesa ne corrosion layer; nekuda kwe oxidation yeH2O2, organic matter iri pamusoro pe wafer inoora kuita CO2, H2O uye inobviswa. Maitiro aya ekuchenesa ave ari evagadziri vesilicon wafer vachishandisa maitiro aya kugadzirisa kuchenesa kwediamond wire cutting monocrystalline silicon wafer, silicon wafer mudzimba neTaiwan uye vamwe vagadziri vemabhatiri vanoshandisa batch velvet white problem complains. Kunewo vagadziri vemabhatiri vakashandisa maitiro akafanana e velvet pre-cleaning, uye vanodzorawo zvinobudirira chitarisiko chevelvet white. Zvinogona kuonekwa kuti nzira iyi yekuchenesa inowedzerwa mukuchenesa kwesilicon wafer kubvisa zvasara zvesilicon wafer kuitira kuti dambudziko rebvudzi jena rigadziriswe zvakanaka pamucheto webhatiri rigadziriswe.

mhedziso

Parizvino, kucheka waya yedhaimani kwave tekinoroji huru yekugadzirisa mumunda wekucheka kwekristaro imwe chete, asi mukusimudzira dambudziko rekugadzira velvet chena kwave kuchinetsa vagadziri vesilicon wafer uye mabhatiri, zvichiita kuti vagadziri vemabhatiri vagadzire waya yedhaimani, silicon wafer ine zvimwe zvinopikisa. Kuburikidza nekuongorora kuenzanisa kwenzvimbo chena, inonyanya kukonzerwa nezvasara pamusoro pesilicon wafer. Kuti tidzivise zviri nani dambudziko resilicon wafer musero, bepa iri rinoongorora zvingangokonzera kusvibiswa pamusoro pesilicon wafer, pamwe nemazano ekuvandudza uye matanho ekugadzira. Zvichienderana nehuwandu, nharaunda uye chimiro chemavara machena, zvikonzero zvinogona kuongororwa uye kuvandudzwa. Zvinokurudzirwa zvikuru kushandisa hydrogen peroxide + alkali cleaning process. Ruzivo rwakabudirira rwakaratidza kuti runogona kudzivirira zvinobudirira dambudziko rekucheka waya yedhaimani silicon wafer kugadzira velvet whitening, kuti zvionekwe nevagadziri veindasitiri nevagadziri.